New Approach in Physical Failure Analysis Based on 3D Reconstruction

Abstract In this work we present a new approach in physical failure analysis. Fault isolation can be done using volume diagnosis techniques. But when studying the identified defect sites by Focused Ion Beam (FIB) cross-sectioning, correct interpretation of cross-sectional views strongly relies on choosing an appropriate cutting strategy. However, techniques do not provide any information which directions and settings to choose avoid misinterpretation spatial evolution defects. The proposed is acquire FIB-SEM tomographic datasets at unequivocally characterize defects three-dimensional visualizations, independent particular cross-sectioning strategies. specific case have applied methodology microcontroller for automotive applications couple floating VIAS were found. Thanks complete obtained with tomography, could assigned class etching tools, root cause thus solved.